政大機構典藏-National Chengchi University Institutional Repository(NCCUR):Item 140.119/112124
English  |  正體中文  |  简体中文  |  Post-Print筆數 : 27 |  全文笔数/总笔数 : 109953/140903 (78%)
造访人次 : 46057899      在线人数 : 1329
RC Version 6.0 © Powered By DSPACE, MIT. Enhanced by NTU Library IR team.
搜寻范围 查询小技巧：
  • 您可在西文检索词汇前后加上"双引号"，以获取较精准的检索结果
  • 若欲以作者姓名搜寻，建议至进阶搜寻限定作者字段，可获得较完整数据
    •  进阶搜寻
    政大機構典藏 > 商學院 > 資訊管理學系 > 期刊論文 >  Item 140.119/112124


    请使用永久网址来引用或连结此文件: https://nccur.lib.nccu.edu.tw/handle/140.119/112124


    题名: Reduction of moisture and airborne molecular contamination on the purge system of 450 mm Front Opening Unified Pod
    作者: 邱銘乾
    Chiu, Bill
    Hu, Shih Cheng
    Shiue, Ren Wei
    Huang, Je Yu
    贡献者: 資管系
    关键词: Absorption spectroscopy;Chemical compounds;Contamination;Impurities;Light measurement;Moisture;Molecular oxygen;Nitrogen removal;Spectroscopy;Vacuum technology;Airborne molecular contaminants;Airborne molecular contamination;Cavity ring down spectroscopies;Compressed dry air;Contamination control;Front-opening unified pods;Manufacturing process;Purge systems;Enclosures
    日期: 2016-05
    上传时间: 2017-08-23 11:35:27 (UTC+8)
    摘要: The Front Opening Unified Pod (FOUP) is used for wafer storage and transport to prevent contamination from internal and external exposure. The FOUP may be contaminated by gases from manufacturing process or by the chemical compounds emitted from the stored wafers in the FOUP. Moisture, oxygen, and Airborne Molecular Contaminations (AMCs) are common sources of many defects and failures of chips. Moisture and Hydrogen Fluoride (HF) are always the most common forms of AMC by virtue of their existence in chemicals. In the past, techniques for removal of these contaminants have used various methods such as purging by nitrogen or compressed dry air (CDA). As the volume of 450 mm FOUP is up to 0.7060 m3, about two and half folds of a 300 mm FOUP, and considering the purge efficiency of purge gas, optimization of FOUP purge technology is urgently needed. In this study, we proposed an alternative method, which combines vacuum technology and purge technology (thereafter referred as "vacuum purge" system). This study aims to evaluate our newly proposed vacuum purge system against the conventional purge system. The Cavity ring-down spectroscopy (CRDS) was used as monitoring system for HF concentration. Results show that with initial Relative Humidity (RH) value of 50% and HF concentration of 9 ppb in the FOUP, RH and HF concentration can be reduced to less than 5% of the initial RH or HF concentration by vacuum purge system in 3 min and 40 s, respectively. For conventional purge system, it took more than 30 min and 80 s to reach that level. For conventional purge system, RH and HF concentration were first-order linearly related to the inversed purge flow rates. Increasing inversed purge flow rate significantly increase purge time.
    關聯: Vacuum, 127, 10-16
    数据类型: article
    DOI 連結: http://dx.doi.org/10.1016/j.vacuum.2016.02.003
    DOI: 10.1016/j.vacuum.2016.02.003
    显示于类别:[資訊管理學系] 期刊論文

    文件中的档案:

    档案 描述 大小格式浏览次数
    index.html0KbHTML2533检视/开启


    在政大典藏中所有的数据项都受到原著作权保护.


    社群 sharing

    著作權政策宣告 Copyright Announcement
    1.本網站之數位內容為國立政治大學所收錄之機構典藏，無償提供學術研究與公眾教育等公益性使用，惟仍請適度，合理使用本網站之內容，以尊重著作權人之權益。商業上之利用，則請先取得著作權人之授權。
    The digital content of this website is part of National Chengchi University Institutional Repository. It provides free access to academic research and public education for non-commercial use. Please utilize it in a proper and reasonable manner and respect the rights of copyright owners. For commercial use, please obtain authorization from the copyright owner in advance.

    2.本網站之製作，已盡力防止侵害著作權人之權益，如仍發現本網站之數位內容有侵害著作權人權益情事者，請權利人通知本網站維護人員(nccur@nccu.edu.tw)，維護人員將立即採取移除該數位著作等補救措施。
    NCCU Institutional Repository is made to protect the interests of copyright owners. If you believe that any material on the website infringes copyright, please contact our staff(nccur@nccu.edu.tw). We will remove the work from the repository and investigate your claim.
    DSpace Software Copyright © 2002-2004  MIT &  Hewlett-Packard  /   Enhanced by   NTU Library IR team Copyright ©   - 回馈